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for the 208HRD, 208C, 108 Auto/SE, and 108C Auto/SE
Both the RPT and RT stages are built into a 150mm diameter mounting collar to enable rapid configuration modifications. Also included are glass and metal spacers for chamber height adjustment, variable rotation speed control, and external tilt adjustment with locking lever. (Note: Tilt adjustment is 0-90° w/o thickness monitor sensor, but limited to 0-60° when the thickness monitor sensor is fitted).
For temporary conversion of the Rotary-Planetary-Tilting Stage into a Rotary-Tilting Stage, 4" (103mm) OD. Holder is made to fit a 4" wafer, three standard 3 x 1" glass sides, or to accommodate larger samples. Also, provided with 12 x M4 threaded holes and screws to secure two standard slides or mount samples. Fits over RPT Stage on central spindle.
Holds three geological or petrographic cross sections up to 47 x 27mm. Compatible with 45 x 25mm, 46 x 26mm, 46 x 27mm and 47 x 27mm. Converts RPT Stage into RT Stage. Fits over R-P-T sample holders on central spindle. Diameter is 4" (102mm).
These sample tables are compatible with rotary-tilting stages #9660 purchased 2019 or later only.
Petrographic Slide Table
This optional table for the Rotary-Tilting Stage #9660 is made to fit 2 petrographic slides with dimensions from 26 x 46 to 28 x 48mm. It has an outer diameter of 75mm.
Large Sample and 4" Wafer Table
This optional table for the Rotary-Tilting Stage #9660 is made to fit a 4" wafer, three standard glass sides, or to accommodate larger samples. To use this larger stage with the MTM-10 Thickness Monitor or MTM-20 Thickness Controller, the Metal Spacer Ring #8091-2 with MTM Bracket (pictured below) would be required. This Sample Table is made of machined aluminum has an outer diameter of 105mm.
Not compatible with MTM-10 Thickness Monitor or MTM-20 Thickness Controller unless purchased with #8091-2 Metal Spacer Ring with MTM Bracket below.
Metal Spacer Ring with MTM Bracket, shown with Crystal Holder (not included)
NEW Metal Spacer Ring with MTM Bracket
This optional Metal Spacer Ring has an added MTM Crystal Holder bracket (Crystal Holder not included) allowing the Crystal Holder to be attached to the side of the chamber. Attaching the Crystal Holder in this location gives room for the Large Sample Table #9660-100 (above) with the MTM-10 or MTM-20 on the Rotary-Tilting Stage #9660.
To give additional room for larger or taller samples, this bracket can be used with either 150mm Rotary Stage option when used on the 108C Auto/SE #9603/9603-220, 108 Auto/SE #7009/7009-220, along with the High Vacuum 208HRD Sputter Coater and 208C Carbon Coater.
Spacer is 150mm diameter x 15mm tall, machined aluminum, O-ring included.
PELCO® Technical Notes, Metal Spacer with MTM Bracket (546KB PDF)