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Cressington Vacuum Coaters

MTM-10 High Resolution Film Thickness Monitor
& MTM-20 High Resolution Film Thickness Controller

for use with Cressington Sputter and Carbon Coaters Only


The High Resolution Thickness Monitor and Thickness Controller are based on the principle that the oscillating frequency of a quartz crystal is changed by the mass of a deposited film on its upper face. Electronically measuring this effect allows for a determination of the thickness of a deposited film. Once the density of the evaporated material is entered into the system, the thickness is measured to a resolution of 0.1nm on a four digit LED display having a range of 0-999.9 nanometers. The crystal and holder are mounted in the vacuum chamber and connected to the FTM Power Supply via the supplied vacuum feedthrough.



film thickness monitor MTM10, MTM_10

MTM-10 High Resolution Thickness Monitor

the economical way to assure thickness control

Accurate manual control of film thicknesses during deposition is difficult if not impossible. A white tile with a drop of oil is sometimes used for rough estimates of coating thicknesses of carbon but cannot be used when repetitious, reproducible coatings are required. Using instrumental settings is also not an accurate method because vacuum level (for sputtering) and time (for evaporation) are very critical parameters. The High Resolution Thickness Monitor offers repeatability of coating thicknesses, removes guesswork and is convenient. The use of a tooling factor allows for exact measurement of the thin films.

The MTM-10 High Resolution Thickness Monitor will fit any of the Cressington sputter and carbon coating systems.
mtm10, mtm_10, mtm_20 System Consists of:
  • MTM-10 Controller Box
  • BNC Cables / BNC Elbow
  • Oscillator Box
  • CS-108 Vacuum Feedthrough with BNC/SMB Connector and Integrated O-ring Seal
  • Crystal Holder Cable 7" / 108mm
  • Crystal Holder with M4 screw size ø19 x 20mm height. Crystal area ø6mm
 

mtm-20 Tickness Controller, MTM_20

MTM-20 High Resolution Thickness Controller

The MTM-20 High Resolution Thickness Controller is specifically designed for the Cressington sputter coater systems and is fully compatible with the 108auto, 108auto/SE, and 208HR sputter coater systems.



MTM-10 High Resolution Thickness Monitor and
MTM-20 High Resolution Thickness Controller Specifications
General Specifications: Microprocessor based, 4-digit display, push-button zero
6MHz crystal with lifetime check
5 times per second update rate
Thickness Range: 0.0 - 999.9nm (pos/neg)
Resolution: 0.1nm for gold or carbon
Density Range: 0.50 - 30.00g/cm³
Tooling Factor Range: 0.25 - 8.0
Vacuum Feedthrough: CS-108; Diameter 10mm up to a plate/flange thickness of 9mm.
Crystal Holder: Stainless Steel ø19 x 20mm. M4 threaded hole for mounting, 1/2" size crystals
Crystal Holder Cable: Mini-SMB, female/female between crystal holder and CS-108 vacuum feedthrough
Processor Function: Four sets of values can be stored in memory under Density and four under Tooling for both the MTM-10 and MTM20
MTM-20 Controller: MTM-20 only: Programmable thickness termination function with termination interface cable on 108 auto, 208HR and DC-100
Termination facility range 0-999.9nm
MTM-10/20 Box Size, WxDxH 210 x 160 x 77mm (8.27" x 6.3" x 3.03")

Prod # Description Unit Price Order / Quote
93004 MTM-10 High Resolution Thickness Monitor System* 110VAC, 50/60Hz each $2475.00
Qty:
93004-220 MTM-10 High Resolution Thickness Monitor System* 220VAC, 50/60Hz each 2475.00
Qty:
93006 MTM-20 High Resolution Thickness Controller System* 115VAC, 50/60Hz each P.O.R.
Qty:
93006-220 MTM-20 High Resolution Thickness Controller System* 220VAC, 50/60Hz each P.O.R.
Qty:
93005 MTM-10 High Resolution Thickness Monitor System, for RPT or RT Stage* 110VAC, 50/60Hz each 2600.00
Qty:
93005-220 MTM-10 High Resolution Thickness Monitor System, for RPT or RT Stage* 220VAC, 50/60Hz each 2600.00
Qty:
93007 MTM-20 High Resolution Thickness Controller System, for RPT or RT Stage* 115VAC, 50/60Hz each P.O.R.
Qty:
93007-220 MTM-20 High Resolution Thickness Controller System, for RPT or RT Stage* 220VAC, 50/60Hz each P.O.R.
Qty:
93004-30 Oscillator for MTM-10/20 each 325.00
Qty:
93004-31 Ext BNC Cable for MTM-10/20, 3 ft. length each 26.75
Qty:
93004-32 CS-108 Vacuum Feedthrough for MTM-10/20 each 295.00
Qty:
93004-35 Crystal Holder for MTM-10/20 each 350.00
Qty:
93004-36 Crystal Holder Cable for MTM-10/20, 6 in. length (for 108) each 55.40
Qty:
93004-37 Crystal Holder Cable for MTM-10/20, 12 in. length (for 108, 108SE, 208, 308)) each 72.00
Qty:
93008 Replacement Crystals for MTM-10/20 pkg/3 42.00
Qty:
93009 Replacement Crystals for MTM-10/20 pkg/10 93.30
Qty:
93004-10 Film Thickness Hardware Kit w/o MTM-10 each 975.00
Qty:
93004-12 Film Thickness Hardware Kit for RPT Stage w/o MTM-10 each 1065.00
Qty:
*The MTM-10 High Resolution Thickness Monitor System and MTM-20 High Resolution Thickness Controller System include: MTM Controller Box, BNC Cable, Oscillator, Vacuum feedthrough; Cables; Crystal holder, test crystal; Instructions
*RPT: Rotary-Planetary-Tilting Stage