The 208HR High Resolution Sputter Coaters from Cressington offer real
solutions to the problems encountered when coating difficult samples for
FESEM imaging. FESEM applications need extremely thin, fine-grained, uniform
coatings to eliminate charging and to improve contrast on low density
materials. In order to minimize the effects of grain size the 208HR offers
a full range of coating materials and gives unprecedented control over
thickness and deposition conditions. The 208HR Turbo Pumped High Vacuum
System offers a wide range of operating pressures allowing precise control
of both uniformity and conformity of the coating, minimizing charging effects.
The HIGH / LOW chamber configuration allows easy adjustment of the distance
from target to sample. The MTM-20 High
Resolution Thickness Controller has a resolution of better than 0.1nm.
This enables precise and reproducible thin coatings, especially in the range
of 0.5 - 3nm, a thickness desirable for FESEM applications.
Preferred Coating Materials for FESEM Applications are:
- Pt/Pd: General-purpose high resolution coating material for non-conducting specimens
- Cr: Excellent for semi-conductor materials and high resolution back scattered electron imaging
- Ir: Excellent, virtually grain-free coating material
The 208HR system is available in a number of configurations to enable to deliver the best
high resolution coatings for your applications. The208HR can be supplied with a standard rotary
backing pump or a dry scroll pump for clean room applications. The standard 208HR includes both
Chromium and Platinum/Palladium as target materials. There is also a 208HR Iridium including an
Iridium target providing excellent fine-grained coating for high resolution FE-SEM imaging on a
wide variety of samples.
Main Features
- Wide choice of Coating Materials. Magnetron head design and effective gas handling allow a wide choice of target materials.
- Precision Thickness Control. Thickness optimized for FESEM operating voltage using the MTM-20 High Resolution Thickness Controller.
- Multi-angle Stage Movements. Separate rotary, planetary and tilting stage movements ensure uniform coating with excellent conformity, even on highly topographic samples.
- Multiple Sample Holders. Four sample holders are provided with options to accommodate sample sizes as large as 32mm diameter.
- Variable Chamber Geometry. Chamber geometry is used to adjust deposition rate to optimize structure.
- Wide Range of Operating Pressures. Independent power and pressure adjustment allows operation at argon gas pressure range of 0.2 - 0.005 mbar.
- Compact, Modern, Benchtop Design. Space and energy saving design eliminates need for floor space, water or specialized electrical connections.
- Ease of Operation. System operation and setup is very similar to standard sputter coating and does not require additional cleaning compared to ion beam coaters.
The complete High Resolution Sputter Coater 208HR is a complete solution
and includes: pumping system, Thickness Controller MTM-20, Rotary-Planetary-Tilting sample Stage with 4
sample holders, Cr & Pt/Pd targets or Ir target.
Ordering Information
| Prod #
| Description
| Unit
| Price
| Order / Quote
|
| 8000
| 208HR High Resolution Sputter Coater for FESEM, 115VAC, 50/60Hz, Cr and Pt/Pd target
| each
| P.O.R.
|
|
| 8002
| 208HR Iridium coater for FESEM, 115VAC, 50/60Hz, Ir target
| each
| P.O.R.
|
|
| 8004
| 208HR High Resolution Sputter Coater for FESEM, Dry-Pumping System, 115VAC, 50/60Hz, Cr and Pt/Pd target
| each
| P.O.R.
|
|
| 8008
| 208HR Iridium coater for FESEM, Dry Pumping System, 115VAC, 50/60Hz, Ir target
| each
| P.O.R.
|
|
| 220V systems when 115V is not available:
|
| 8000-220
| 208HR High Resolution Sputter Coater for FESEM, 220VAC, 50/60H, Cr and Pt/Pd target
| each
| P.O.R.
|
|
| 8002-220
| 208HR Iridium coater for FESEM, 220VAC, 50/60Hz, Ir target
| each
| P.O.R.
|
|
| 8004-220
| 208HR High Resolution Sputter Coater for FESEM, Dry-Pumping System, 220VAC, 50/60Hz, Cr and Pt/Pd target
| each
| P.O.R.
|
|
| 8008-220
| 208HR Iridium coater for FESEM, Dry Pumping System, 220VAC, 50/60Hz, Ir target
| each
| P.O.R.
|
|
Specifications for the 208HR High Resolution Sputter Coater
Rotary-Planetary-Tilting & Rotary-Tilting Stages
Sputter Targets
Accessories, Spares and Consumables for 208 Series Coaters
MTM-20 High Resolution Thickness Controller
Ted Pella, Inc has been an authorized distributor, including exclusive in the Americas, for the complete range of Cressington vacuum coating systems for over 25 years. Cressington Scientific Instruments Ltd, based in Watford, UK develops, designs and manufactures vacuum coating systems for scanning electron microscopy (SEM), transmission electron microscopy (TEM) specimen preparation and thin film research applications. Core competencies of Cressington are vacuum technology, DC magnetron sputtering technology, electron beam evaporation technology for EM, cryo technology for EM and thermal evaporation. The Cressington products range comprises 108 series sputter coaters for standard SEM sample coating, the 108 series carbon coaters for standard EDX coating, the 208HR for field emission SEM (FESEM) sample coating, and the 208C high vacuum turbo carbon coater for TEM/EBSD/microprobe carbon coating. Cressington takes pride in building products which have excellent quality, are compact bench-top systems and are easy to use.