Ultra High Vacuum Compatible
Micro and Macro Analysis
Standard for Surface & X-ray Analysis
- UHV (ultrahigh vacuum) compatible (10-10 torr)
- Suitable for spectral and intensity references for EDS, WDS, EPMA, Auger, XPS, ESCA, etc.
- Custom and standard reference material configurations
- Rectangular or circular retainers holding from 6 to 37 reference standards
- Retainers machined from SS304
- Custom mounting bases available
- Each reference standard is individually and separately prepared from bulk or powdered materials, polished with the most suitable method, and can easily
be removed or reinserted into the retainer
Analysis accuracies of 1-2% (relative) are possible only when appropriate standards are used.
UHV systems cannot accept commonly available standard sets because of outgassing of mount materials
and degradation from electron beam heating. The use of bakelite, plastic or epoxy embedded standards
under UHV conditions have prevented accurate analysis. These inaccuracies are caused by compromised
vacuum levels and contaminated reference standards. Also, standardless techniques give no indication
that some elements may not be accounted for or are present in an oxide phase.
Reference standards supplied with the UHV-EL, which contain only UHV compatible materials, can be
used to characterize the transmission of the electron energy analyzer, determine peak shapes,
resolution, energies and sensitivity factors.
Since generalized sensitivity factors cannot be used with a reasonable degree of accuracy, even for
the same instrument model, it is necessary for these factors to be determined for each unique instrument,
on a continuing basis. Conditions will change over time because of peak shift, amplifier settings and
spectrometer tolerances.
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Construction and Design
The retainer is precision machined from
stainless steel 304. Each retainer has holes machined with a 0.13mm boss at the top. All reference
standards are precisely referenced within 0.13mm
of the top surface. This recess protects the reference standard surfaces from contamination and scratching
and also minimizes the possibility of X-ray fluorescence from the retainer. The reference standards, which
are of various thicknesses, are retained by SS304 clips which are inserted from the back of the mount.
The round UHV-EL-37 is laser engraved to assist in locating the desired reference standard using electron
Reference standards are individually sized and polished according to the properties of the material.
Cross contamination and smearing is avoided.
If a reference standard surface gets roughened from excessive ion beam sputtering or is too highly oxidized,
it can be easily removed and replaced in your laboratory. Tools and clips are provided. If bulk materials are
not available for some reference standards, powders are used. They are consolidated with silver flake and the
powder grains metallographically polished. Many insulators prepared this way are sufficiently conductive for
X-ray and Auger analysis without carbon coating; all minerals and glasses are coated with ~20nm of carbon.
The silver can be used for reference when determining sensitivity
factors.
Custom Preparation
Your materials may be inserted into one of the retainers described using careful techniques. Electron beam X-ray
techniques and reference standards - which are charge sensitive - can be carbon coated. All nonconductive minerals
and glasses are coated with ~20nm of carbon.
Shipping
UHV-EL-37 circular retainer reference standards are shipped in a VACU-STORR container. It is optional for other
configurations or custom orders.
Certification
The purity or composition of each reference standard is certified by the manufacturer. The SRM classes and
certified alloys are NIST traceable, please see information on Reference Standards and Alloys below.
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