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G-1 Silicon Calibration Specimen

Details of the Pelcotec™ G-1 Calibration Specimen

	4 x 4mm die with 3 x 3mm grid with 1µm pitch X and Y mm scale fiducial finders Unique serial number
	Close-up of major (1.0 and 0.5mm) and minor (0.1mm) fiducial marks
	Close-up of 1µm pitch grid with 10µm and 100µm lines

	Enlarged view of grid pattern

	SEM image of grid pattern

633-1 Sample Certificate of Traceability (157KB PDF)
633-11 Sample Certificate of Calibration (185KB PDF)

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