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Ted Pella, Inc announces the availability of the new
Pelcotec™ CDMS series Critical Dimensions Magnification Standard. These new calibration
standards have been developed for easy, quick and precise magnification calibration over
a wide magnification range for SEM, FESEM, FIB and CD-SEM.
The affordable Pelcotec™ CDMS calibration standards are
manufactured using a conductive ultra flat silicon substrate with precise chromium deposition for
all feature sizes from 2mm to 5µm. For feature sizes from 2µm to 100nm a 50nm gold over 20nm
chromium deposition has been used. The Cr and Au/Cr on Si provide excellent contrast in both SE
and BSE imaging mode. The features are easier to detect than on etched Si standard and since all
the materials involved are conductive there are no charging issues with this standard. Feature
sizes smaller than 10µm are nested for quick navigation.
The fully featured Pelcotec™ CDMS calibration standards
are available with two feature size ranges, which are both offered as traceable or certified
standards, making a total of 4 versions:
Pelcotec™ CDMS-1T and -1C; Traceable or certified versions
with features from 2.0mm to 1µm for a magnification range of 10x - 20,000x. Ideal for desk top
SEMs and low to medium SEM applications.
Pelcotec™ CDMS-0.1T and -0.1C; Traceable and certified
versions with features from 2.0mm to 100nm for a magnification range of 10x – 200,000x. Useful
for low to high resolution applications for SEM, FESEM, FIB and CD-SEM.
The size of the standards is 2.5 x 2.5mm with a thickness of 625µm. They are available either
un-mounted or mounted on a choice of SEM sample stub. Due to its sturdy construction, the
Pelcotec™ CDMS standards can be easily cleaned using a plasma
cleaner.
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