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Calibration Overview
Critical Dimension Magnification Standards Overview

NEW Pelcotec™ Etched Si CDMS
Critical Dimension Magnification Standard

Available as NIST Traceable or as Certified against NIST Standard


PELCO CDMS ISO Critical Dimension Magification Standards

Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration in the X axis.

Fully-featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques for etching features yielding superior line edge quality (Line edge roughness of +/- 0.3nm per 1um length of line edge) and are ideal for low keV imaging (≤1keV).

The Pelcotec™ Etched Si CDMS Calibration Standard is available with two feature size ranges, which are both offered as traceable and certified standards, making a total of 4 versions:

Pelcotec™ Etched Si CDMS-1T
Fully traceable with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-1T Traceable Certificate (271KB PDF)

Pelcotec™ Etched Si CDMS-0.1T
Fully traceable with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-0.1T Traceable Certificate (272KB PDF)

Pelcotec™ Etched Si CDMS-1C
Individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-1C Conformance Certificate (190KB PDF)

Pelcotec™ CDMS-0.1C
Individually certified against a NIST standard with features from 2.0mm to 100nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-0.1C Conformance Certificate (190KB PDF)

Pelcotec™ Technical Notes for CDMS - Critical Dimension Magnification Standards (149KB PDF)


Comparison Table Below



Feature sizes for the Pelcotec™ Etched Si CDMS-1T and -1C are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm and 1µm

Feature sizes for the Pelcotec™ Etched Si CDMS-0.1T and -0.1C are:
2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm and 100nm

 SDMS-2
500nm, 250nm and 100nm lines are only on the Etched Si CDMS-0.1T and 0.1C products




The Pelcotec™ Etched Si CDMS Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precision etched lines for features sets from 100nm to 2µm. Due to its sturdy construction, the CDMS standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ Etched Si CDMS Calibration Standard has a unique identification number.

They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ Etched Si CDMS is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.

The Etched Si CDMS standard may also be mounted on a custom mount of your choice.

Store the Pelcotec™ Etched Si CDMS Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.
PELCO CDMS-1T AND 1C

NEW Pelcotec™ Etched Si CDMS-1T

NIST traceable with features from 2mm to 1µm for magnification 10x - 20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 10µm, 5µm, 2µm, and 1µm

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
699-1 Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, unmounted each $100.00
Qty:
699-1A Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount A each 125.00
Qty:
699-1B Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount B each 125.00
Qty:
699-1C Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount C each 125.00
Qty:
699-1D Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount D each 125.00
Qty:
699-1E Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount E each 125.00
Qty:
699-1F Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount F each 125.00
Qty:
699-1G Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, you supply mount each 250.00
Qty:
699-1K Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount K each 125.00
Qty:
699-1L Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount L each 125.00
Qty:
699-1M Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount M each 125.00
Qty:
699-1O Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount O each 125.00
Qty:
699-1P Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount P each 125.00
Qty:
699-1Q Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount Q each 125.00
Qty:
699-1R Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount R each 125.00
Qty:
699-1AFM Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, 12mm AFM Disc each 125.00
Qty:
699-1S Pelcotec™ CDMS-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, 25 x 75mm glass slide each 125.00
Qty:




PELCO CDMS Magnification Standard

NEW Pelcotec™ Etched Si CDMS-0.1T

NIST traceable with features from 2mm to 100nm for magnification 10x - 200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
700-01 Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, unmounted each $500.00
Qty:
700-01A Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount A each 525.00
Qty:
700-01B Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount B each 525.00
Qty:
700-01C Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount C each 525.00
Qty:
700-01D Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount D each 525.00
Qty:
700-01E Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount E each 525.00
Qty:
700-01F Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount F each 525.00
Qty:
700-01G Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, you supply mount each 650.00
Qty:
700-01K Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount K each 525.00
Qty:
700-01L Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount L each 525.00
Qty:
700-01M Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount M each 525.00
Qty:
700-01O Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount O each 525.00
Qty:
700-01P Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount P each 525.00
Qty:
700-01Q Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount Q each 525.00
Qty:
700-01R Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, Mount R each 525.00
Qty:
700-01AFM Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, 12mm AFM Disc each 525.00
Qty:
700-01S Pelcotec™ CDMS-0.1T, 2mm - 100nm, etched lines on Si, traceable to NIST, 25 x 75mm glass slide each 525.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ Etched Si CDMS-1C

Certified against NIST standard with features from 2mm to 1µm for magnification 10x - 20,000x, ideal for desktop SEM.

Feature sizes: 2mm, 1mm, 0.5mm, 0.25mm, 10µm, 5µm, 2µm, and 1µm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
703-1 Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, unmounted each $750.00
Qty:
703-1A Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount A each 775.00
Qty:
703-1B Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount B each 775.00
Qty:
703-1C Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount C each 775.00
Qty:
703-1D Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount D each 775.00
Qty:
703-1E Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount E each 775.00
Qty:
703-1F Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount F each 775.00
Qty:
703-1G Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, you supply mount each 900.00
Qty:
703-1K Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount K each 775.00
Qty:
703-1L Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount L each 775.00
Qty:
703-1M Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount M each 775.00
Qty:
703-1O Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount O each 775.00
Qty:
703-1P Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount P each 775.00
Qty:
703-1Q Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount Q each 775.00
Qty:
703-1R Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount R each 775.00
Qty:
703-1AFM Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, 12mm AFM Disc each 775.00
Qty:
703-1S Pelcotec™ CDMS-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, 25 x 75mm glass slide each 775.00
Qty:




PELCO CDMS Magnification Standard

NEW Pelcotec™ Etched Si CDMS-0.1C

Certified against NIST standard with features from 2mm to 100nm for magnification 10x - 200,000x for SEM, FE-SEM and FIB.

Feature sizes: 2mm, 1mm, 0.5mm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, and 100nm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
704-01 Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, unmounted each $1000.00
Qty:
704-01A Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount A each 1025.00
Qty:
704-01B Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount B each 1025.00
Qty:
704-01C Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount C each 1025.00
Qty:
704-01D Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount D each 1025.00
Qty:
704-01E Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount E each 1025.00
Qty:
704-01F Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount F each 1025.00
Qty:
704-01G Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, you supply mount each 1150.00
Qty:
704-01K Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount K each 1025.00
Qty:
704-01L Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount L each 1025.00
Qty:
704-01M Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount M each 1025.00
Qty:
704-01O Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount O each 1025.00
Qty:
704-01P Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount P each 1025.00
Qty:
704-01Q Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount Q each 1025.00
Qty:
704-01R Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, Mount R each 1025.00
Qty:
704-01AFM Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, 12mm AFM Disc each 1025.00
Qty:
704-01S Pelcotec™ CDMS-0.1C, 2mm - 100nm, etched lines on Si, certified to a NIST standard, 25 x 75mm glass slide each 1025.00
Qty:




  Pelcotec™ Etched Si
CDMS-1		 Pelcotec™ Etched Si
CDMS-0.1
Substrate: High conductivity silicon (resistivity of 0.001 - 0.002 Ohm/cm) ✓ ✓
Substrate size: 2.5 x 2.5mm ✓ ✓
Substrate thickness: 525 ±10µm ✓ ✓
Unique serial identification number per chip — ✓
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm ✓ ✓
Graticule lines perpendicular to the X axis ruled at 10µm, 5µm, 2µm and 1µm pitch ✓ ✓
High Resolution version only - Additional graticule lines perpendicular to X axis ruled at 500, 250 and 100nm pitch — ✓
Traceable at the wafer level to NIST T versions T versions
Direct certification of CDMS chip to a NIST standard C versions C versions
Available unmounted ✓ ✓
SEM mounts A-R available ✓ ✓
Precision better than 0.3% ✓ ✓
Line edge roughness of +/- 0.3nm per 1um length of line edge ✓ ✓