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Calibration Overview
Critical Dimension Magnification Standards Overview

NEW Pelcotec™ Etched Si CDMS-XY
Critical Dimension Magnification Standard

Available as NIST Traceable or as Certified against NIST Standard


PELCO CDMS-XY ISO Critical Dimension Magification Standards

Easy to use and very useful for quick and precise SEM, FE-SEM, FIB, CD-SEM, LM, and AFM magnification calibration. Fiducial lines are provided in both X and Y axes for ease of 2 axis calibration without stage rotation.

Fully-featured and traceable calibration standards for a wide measurement range. They are made using the latest semiconductor and MEMS manufacturing techniques for etching features yielding superior line edge quality (Line edge roughness of +/- 0.3nm per 1um length of line edge) and are ideal for low keV imaging (≤1keV).

The Pelcotec™ Etched Si CDMS-XY Calibration Standard is available with two feature size ranges, which are both offered as traceable and as certified standards, making a total of 4 unmounted versions:

Pelcotec™ Etched Si CDMS-XY-1T
Fully traceable with features from 2.0mm to 1um for a magnification range from 10x - 20,000x; ideal for desktop SEMs and low to medium magnification applications.
Representative CDMS-XY-1T Traceable Certificate (214KB PDF)

Pelcotec™ Etched Si CDMS-XY-0.1T
Fully traceable with features from 2.0mm to 50nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1T Traceable Certificate (188KB PDF)

Pelcotec™ Etched Si CDMS-XY-1C
Individually certified against a NIST standard with features from 2.0mm to 1µm for a magnification range from 10x - 20,000x; ideal for desk top SEMs and low to medium magnification applications.
Representative CDMS-XY-1C Conformance Certificate (270KB PDF)

Pelcotec™ Etched Si CDMS-XY-0.1C
Individually certified against a NIST standard with features from 2.0mm to 50nm for a magnification range up to 10x - 200,000x; for all SEM and most FE-SEM applications.
Representative CDMS-XY-0.1C Conformance Certificate (261KB PDF)


Comparison Table Below



Feature sizes for the Pelcotec™ Etched Si CDMS-XY-1C are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

Feature sizes for the Pelcotec™ Etched Si CDMS-XY-0.1C are:
2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, 100nm, and 50nm

 SDMS-2
500nm, 250nm, 100nm and 50nm lines are only on the Etched Si CDMS-XY- 0.1T and 0.1C products




The Pelcotec™ Etched Si CDMS-XY Critical Dimensions and Magnification Standards are made on an ultra flat silicon substrate with a precision etched lines for features sets from 100nm to 2µm. Due to its sturdy construction, the CDMS-XY Standard can be cleaned using a plasma cleaner on low settings.

The smaller features are nested for easy navigation and quick calibration. The accuracy of the features is 0.3% or better. The actual size of the standard is 2.5 x 2.5mm with a thickness of 525µm ±10µm. There is no coating on the Si surface. Each Pelcotec™ Etched Si CDMS-XY Calibration Standard has a unique identification number.

They are available either unmounted or mounted on SEM holders A-R. For AFM applications the Pelcotec™ Etched Si CDMS-XY is mounted on a 12mm AFM disc; for LM applications it is mounted on a 25 x 75mm glass slide.

The Etched Si CDMS-XY Standard may also be mounted on a custom mount of your choice.

Store the Pelcotec™ Etched Si CDMS-XY Calibration Standard in a vacuum desiccator such as the PELCO® SEM Sample Stub Vacuum Desiccator.
PELCO CDMS-1T AND 1C

Pelcotec™ Etched Si CDMS-XY-1T

NIST traceable* with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

*Uses average data measured for each production wafer.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, and 1µm

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
701-1 Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, unmounted each $175.00
Qty:
701-1A Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount A each 200.00
Qty:
701-1B Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount B each 200.00
Qty:
701-1C Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount C each 200.00
Qty:
701-1D Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount D each 475.00
Qty:
701-1E Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount E each 200.00
Qty:
701-1F Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount F each 200.00
Qty:
701-1G Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, you supply mount each 325.00
Qty:
701-1K Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount K each 200.00
Qty:
701-1L Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount L each 200.00
Qty:
701-1M Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount M each 200.00
Qty:
701-1O Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount O each 200.00
Qty:
701-1P Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount P each 200.00
Qty:
701-1Q Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount Q each 200.00
Qty:
701-1R Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, Mount R each 200.00
Qty:
701-1AFM Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, 12mm AFM Disc each 200.00
Qty:
701-1S Pelcotec™ CDMS-XY-1T, 2mm - 1µm, etched lines on Si, traceable to NIST, 25 x 75mm glass slide each 200.00
Qty:




PELCO CDMS-1T AND 1C

Pelcotec™ Etched Si CDMS-XY-0.1T

NIST traceable* with features from 2mm to 50nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.

*Uses average data measured for each production wafer.

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm, 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, 100nm, and 50nm

See mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
702-01 Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, unmounted each $1000.00
Qty:
702-01A Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount A each 1025.00
Qty:
702-01B Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount B each 1025.00
Qty:
702-01C Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount C each 1025.00
Qty:
702-01D Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount D each 1025.00
Qty:
702-01E Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount E each 1025.00
Qty:
702-01F Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount F each 1025.00
Qty:
702-01G Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, you supply mount each 1150.00
Qty:
702-01K Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount K each 1025.00
Qty:
702-01L Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount L each 1025.00
Qty:
702-01M Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount M each 1025.00
Qty:
702-01O Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount O each 1025.00
Qty:
702-01P Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount P each 1025.00
Qty:
702-01Q Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount Q each 1025.00
Qty:
702-01R Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, Mount R each 1025.00
Qty:
702-01AFM Pelcotec™ CDMS-XY-0.1T, 2mm - 50nm, etched lines on Si, traceable to NIST, 12mm AFM Disc each 1025.00
Qty:
702-01S Pelcotec™ CDMS-XY-1T, 2mm - 50nm, etched lines on Si, traceable to NIST, 25x75mm glass slide each 1025.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ Etched Si CDMS-XY-1C

Certified* against NIST standard with features from 2mm to 1µm for magnification 10x-20,000x, ideal for desktop SEM.

*Each scale calibrated against a NIST measured standard

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm,10µm, 5µm, 2µm, and 1µm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
705-1 Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, unmounted each $1250.00
Qty:
705-1A Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount A each 1275.00
Qty:
705-1B Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount B each 1275.00
Qty:
705-1C Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount C each 1275.00
Qty:
705-1D Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount D each 1275.00
Qty:
705-1E Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount E each 1275.00
Qty:
705-1F Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount F each 1275.00
Qty:
705-1G Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, you supply mount each 1400.00
Qty:
705-1K Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount K each 1275.00
Qty:
705-1L Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount L each 1275.00
Qty:
705-1M Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount M each 1275.00
Qty:
705-1O Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount O each 1275.00
Qty:
705-1P Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount P each 1275.00
Qty:
705-1Q Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount Q each 1275.00
Qty:
705-1R Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, Mount R each 1275.00
Qty:
705-1AFM Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, 12mm AFM Disc each 1275.00
Qty:
705-1S Pelcotec™ CDMS-XY-1C, 2mm - 1µm, etched lines on Si, certified to a NIST standard, 25 x 75mm glass slide each 1275.00
Qty:




PELCO CDMS-1T AND 1C

NEW Pelcotec™ Etched Si CDMS-XY-0.1C

Certified* against NIST standard with features from 2mm to 50nm for magnification 10x-200,000x for SEM, FE-SEM and FIB.

* Each scale calibrated against a NIST measured standard

Feature sizes: 2mm, 1mm, 0.5mm, 0.1mm, 50µm 10µm, 5µm, 2µm, 1µm, 500nm, 250nm, 100nm, and 50nm

See SEM mount selections, types A-R

Made in USA
Prod # Description Unit Price Order / Quote
706-01 Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, unmounted each $2000.00
Qty:
706-01A Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount A each 2025.00
Qty:
706-01B Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount B each 2025.00
Qty:
706-01C Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount C each 2025.00
Qty:
706-01D Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount D each 2025.00
Qty:
706-01E Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount E each 2025.00
Qty:
706-01F Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount F each 2025.00
Qty:
706-01G Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, you supply mount each 2150.00
Qty:
706-01K Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount K each 2025.00
Qty:
706-01L Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount L each 2025.00
Qty:
706-01M Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount M each 2025.00
Qty:
706-01O Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount O each 2025.00
Qty:
706-01P Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount P each 2025.00
Qty:
706-01Q Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount Q each 2025.00
Qty:
706-01R Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, Mount R each 2025.00
Qty:
706-01AFM Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, 12mm AFM Disc each 2025.00
Qty:
706-01S Pelcotec™ CDMS-XY-0.1C, 2mm - 50nm, etched lines on Si, certified to a NIST standard, 25 x 75mm glass slide each 2025.00
Qty:




  Pelcotec™ Etched Si
CDMS-XY-1		 Pelcotec™ Etched Si
CDMS-XY-0.1
Substrate: High conductivity silicon (resistivity of 0.001 - 0.002 Ohm/cm) ✓ ✓
Substrate size: 2.5 x 2.5mm ✓ ✓
Substrate thickness: 525 ±10µm ✓ ✓
Unique serial identification number per chip    
Calibration squares at 2mm, 1mm, 0.5mm, 0.25mm ✓ ✓
Graticule lines perpendicular to X and Y axes ruled at 10um, 5um, 2um and 1um pitch ✓ ✓
High Resolution version only - Additional graticule lines perpendicular to X and Y axes ruled at 500, 250, 100nm and 50nm pitch — ✓
Traceable at the wafer level to NIST T versions T versions
Direct certification of CDMS chip to a NIST standard C versions C versions
Available unmounted ✓ ✓
SEM mounts A-R available ✓ ✓
Precision better than 0.3% ✓ ✓
Line edge roughness of +/- 0.3nm per 1um length of line edge. ✓ ✓