TEM Grids Overview
PELCO® Silicon Nitride Support Films for TEM
Hydrophobic/Hydrophilic Silicon Nitride Support Films
Silicon Aperture Frames (without support films)
Silicon Nitride Coated 3mm Disks (blanks)

PELCO^® Holey Silicon Nitride Support Film for TEM

200nm membrane with holes from 5µm down to 100nm

Holey 200nm silicon nitride support frame on 3mm frame	0.5 x 0.5mm window with holey silicon nitride membrane imaged from back side

Advanced MEMS technologies have been applied to incorporate many improvements into this truly unique next generation Holey Silicon Nitride Support Membrane. Holey membranes or support films are also referred to as perforated or patterned films; there is no film or membrane covering the holes. The platform for this holey silicon nitride support film is the low stress 200nm amorphous silicon nitride support film on a circular 3mm silicon frame with a 0.5 x 0.5mm window. There are twelve hole sizes available ranging from 100nm to 5µm. This design has a number of advantages over previously offered products:

• Large open area
• Closely packed, higher pore density using hexagonal pore pattern
• Added resilience of membrane
• Practical hole size for experiments
• TEM standard circular shape and size
• EasyGrip™ edge for improved handling

The PELCO^® Silicon Nitride Support Films are resistant to solvents, acids and bases, allowing for dynamic experiments directly on the holey membrane. The Silicon Nitride Support Films allow for high temperature experiments/imaging up to 1000°C. Films can be easily cleaned using glow discharge or plasma cleaning techniques. They also provide a carbon-free background for TEM imaging and analysis. The clean manufacturing techniques avoid the debris particles that are often found on other makes of silicon nitride support films.

See manufacturing details of Silicon Nitride Membranes

Pore positions in 200nm Silicon Nitride Membrane

MSDS 21500-21525, 21535, 21540-21542, 21555 (367KB PDF)

Product Specifications
Defining parameters for the PELCO^® Holey Silicon Nitride Support Films are:

• Membrane Thickness: 200nm for added resilience
• Window Size: 0.5 x 0.5mm
• Pore Diameter: Sizes are within 10% of diameter
• Pattern: Close packed hexagonal arrangement of rows and columns - see table
• Perforated Area: See table
• Nominal Porosity: Range between 22.3% to 22.8%
• Frame Thickness: Silicon support structure is 200µm standard. This allows for fitting in standard TEM holders and gives a sturdy support frame
• Surface Roughness: The RMS (Rq) is 0.65 +/- 0.06nm which gives a mean roughness (Ra) of 0.45 +/- 0.02nm
• Frame Diameter: TEM standard 3mm diameter disc, fully compatible with regular TEM holders and with EasyGrip™ edges for improved handling
• Packaging: The PELCO^® Holey Silicon Nitride Support Films are packaged under cleanroom conditions. Each box holds 10 support films.

Single Pore Sizes

HOLE SIZE PORE TYPE PITCH µm ARRAY A B C 5000nm circular  10.0µm 90 x 90 450µm 450µm 25µm 2500nm circular   5.0µm 45 x 45 450µm 450µm 25µm 1250nm circular   2.5µm 180 x 180 450µm 450µm 25µm 1000nm circular 2.0µm 225 x 225 450µm 450µm 25µm 750nm circular 1.5µm 300 x 300 450µm 450µm 25µm 500nm circular 1.0µm 450 x 450 450µm 450µm 25µm 400nm circular 0.80µm 562 x 562 450µm 450µm 25µm 300nm circular 0.60µm 750 x 750 450µm 450µm 25µm 250nm circular 0.50µm 900 x 900 450µm 450µm 25µm 200nm circular 0.40µm 1125 x 1125 450µm 450µm 25µm 150nm circular 0.40µm 1125 x 1125 450µm 450µm 25µm 100nm  circular 0.20µm 375 x 375 75µm 75µm 212.5µm

Prod #	Description	Unit	Price	Order / Quote
21536-10	NEW PELCO® Holey Silicon Nitride Support Film, 200nm, 5µm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	$325.05	Qty:
21535-10	PELCO® Holey Silicon Nitride Support Film, 200nm, 2.5µm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	325.05	Qty:
21580-10	PELCO® Holey Silicon Nitride Support Film, 200nm, 1250nm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	325.05	Qty:
21581-10	PELCO® Holey Silicon Nitride Support Film, 200nm, 1000nm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	325.05	Qty:
21582-10	PELCO® Holey Silicon Nitride Support Film, 200nm, 750nm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	325.05	Qty:
21583-10	PELCO® Holey Silicon Nitride Support Film, 200nm, 500nm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	325.05	Qty:
21584-10	PELCO® Holey Silicon Nitride Support Film, 200nm, 400nm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	325.05	Qty:
21588-10	PELCO® Holey Silicon Nitride Support Film, 200nm, 300nm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	325.05	Qty:
21587-10	PELCO® Holey Silicon Nitride Support Film, 200nm, 250nm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	325.05	Qty:
21586-10	PELCO® Holey Silicon Nitride Support Film, 200nm, 200nm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	325.05	Qty:
21590-10	NEW PELCO® Holey Silicon Nitride Support Film, 200nm, 150nm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	500.00	Qty:
21585-10	PELCO® Holey Silicon Nitride Support Film, 200nm, 100nm pores, 0.5 x 0.5mm window, Ø3mm	pkg/10	500.00	Qty:

Multiple Pore Sizes

HOLE SIZE PORE TYPE PITCH µm ARRAY POSITION 1250nm circular   2.0µm 12 x 12 A 900nm circular 1.5µm 17 x 17 B 600nm circular 1.0µm 25 x 25 C 400nm circular 0.8µm 31 x 31 D 350nm circular 0.6µm 42 x 42 E 250nm circular 0.5µm 50 x 50 F 200nm circular 0.4µm 65 x 65 G 150nm circular 0.3µm 80 x 80 H 70-100nm  circular 0.2µm 125 x 125 I

Prod #	Description	Unit	Price	Order / Quote
21589-10	PELCO® Holey Silicon Nitride Support Film, 200nm, multiple pore sizes, 1250nm, 900nm, 600nm, 400nm, 350nm, 250nm, 150nm and 70-100nm, 0.5 x 0.5mm window, Ø3mm	pkg/10	$548.10	Qty:

Back Side of PELCO® Holey Silicon Nitride Support Film (enlarged)	Front Side of PELCO® Holey Silicon Nitride Support Film (enlarged)